Ensuring that this enhanced within-chip etch precision extends across the entire wafer, the Centris Sym3 system has been comprehensively redesigned for True Symmetry™ of power, gas delivery, and thermal characteristics necessary. In addition, improvements to Pulsync™ increase the effectiveness of synchronized plasma pulsing to minimize pattern loading. Users can enhance further performance with optional dual frequency bias that facilitates the etching of challenging high aspect ratio features.
The genus Centris contains circa 250 species of large apid bees occurring in the Neotropical and Nearctic regions, from Kansas to Argentina. Most females of these bees possess adaptations for carrying floral oils rather than (or in addition to) pollen or nectar. They visit mainly plants of the family Malpighiaceae to collect oil, but also Plantaginaceae, Calceolariaceae, Krameriaceae and others. Recent studies have shown they are sister to the corbiculate bees, the most well-known and economically important group of bees [1]
To achieve the tight degree of within-chip etch control needed for such precise patterning, the new system creates a dramatically cleaner chamber environment that significantly accelerates the removal of etch byproducts—a major cause of variation. Both larger chamber volume and higher gas flows minimize the amount of byproduct that redeposits on the wafer, where it can pinch off narrow spaces and create etch depth variations, cause unacceptable variations between densely packed and isolated features, or exacerbate line edge roughness. Preventing byproduct accumulation also reduces particle formation and resultant defect creation.
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Le patrimoine architectural de Québec comprend l'ensemble des bâtiments de l'Assemblée nationale qui ont été érigés sur la colline Parlementaire à partir de 1877. On y retrouve deux styles architecturaux, soit le style Second Empire pour l'Hôtel du Parlement et l'architecture Beaux-Arts pour les autres édifices. La Citadelle de Québec, construite entre 1820 et 1831, le Château Frontenac, bâti entre 1892 et 1893, et la Terrasse Dufferin font également partie du site patrimonial du Vieux-Québec.
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